Resistor-Based Temperature Sensors: Technical Review

  • Yong Tae Lee Yonsei University
  • Woo Jun Choi Yonsei University
  • Young Cheol Chae Yonsei University
Keywords: CMOS temperature sesor, Energy-efficiency, High resolution, Resistor-based temperature sensor, Silicided polysilicon resistors

Abstract

This paper presents an overview of recently developed resistor-based temperature sensors, which achieved high energy-efficiency and high resolution. Such sensors consist of poly-silicon resistors, which has relatively high TCs, low 1/f noise, supply dependency, and stress sensitivity. Various design techniques and performances of the resistor-based temperature sensors, in particular their energy-efficiency and resolutions, will be compared to each other and summarized.

Published
2020-12-31
Section
Articles