Resistor-Based Temperature Sensors: Technical Review
Keywords:
CMOS temperature sesor, Energy-efficiency, High resolution, Resistor-based temperature sensor, Silicided polysilicon resistors
Abstract
This paper presents a technical overview of recently developed resistor-based temperature sensors, which achieve high energy-efficiency and high resolution, simultaneously. Such sensors consist of silicided polysilicon resistors that have relatively high temperature coefficients (TCs), low 1/f noise, low supply dependency, and low stress sensitivity. Various design techniques of resistor-based sensors are compared and their performances are summarized.
Published
2020-12-31
How to Cite
Lee, Y. T., Choi, W. J., & Chae, Y. C. (2020). Resistor-Based Temperature Sensors: Technical Review. Journal of Integrated Circuits and Systems, 7(1). https://doi.org/10.23075/jicas.2021.7.1.005
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Section
Articles